Horizontal Multi-Functional Furnace
Function
Technical Parameters
Pindola™ Horizontal Multi-Functional Furnace PLX200
Advantage
Customized multi-process combination machine.
Soft landing design, reducing equipment cost.
High productivity.
or call:
86-18924169069 / 020-31569374
Technical Parameters
Wafer size: Below 8 inches
Process types: Oxidation, Anneal, Alloy, LPCVD
Compatible materials: Silicon, Silicon Carbide
Application fields: Power semiconductors, Optoelectronic devices, Research
